Business challenge

• Semiconductor OEM uses traditionally established preventive maintenance schedules to reduce risk of expensive, unexpected downtime
• These schedules are mostly very conservative; they systematically take tools down more frequently than truly necessary to operate safely and in spec, which is costly

Solution

• is collaborating with the OEM to develop next generation preventative maintenance schedules utilizing a variety of diagnostic measurements in combination to evaluation the likelihood of an impending failure

Business benefit

• Increase availability and utilization while still minimizing the risk of expensive  downtime